Queensgate Instruments has extended its range of high-performance nanopositioning piezo stages with a direct-drive, heavy-duty stage capable of moving loads of up to 10 kg at high speeds.
The stage is available with either 60 µm or 100 µm travel and can be calibrated for use in either horizontal (X) or vertical (Z) travel. Both configurations offer the sub-nanometer resolution required for precision manufacturing applications.
The stage achieves its high-precision movements through the combination of flexure-guidance together with capacitive sensors, as Queensgate product manager, Craig Goodman, explains:
‘The system features flexure-guided motion that virtually eliminates rotational errors. The capacitive sensors directly measure the platform’s movement, which combined with the near infinite resolution of piezo actuators and our low noise control electronics helps ensures the highest-precision positioning.’
Users can select calibration parameters to suit their application and payload to achieve rapid step-settle times. A 1 µm step taking less than 8 ms with a 6 kg payload.
Designed for demanding, high-precision industrial applications, typical uses include:
- Optical assembly positioning in semiconductor inspection
- Microscope nose piece positioning
- Precision manufacturing
Learn more and download the datasheet.
