- Available in 60 and 100 μm versions
- Load capacity to 10 kg
- Flexure guided for highest precision
- Fast response from direct-drive piezo actuator
- Capacitive sensors provide direct measurement of the moving platform
- Selectable configurations for optimal performance with different loads
NPS-X-60D and NPS-X-100D High-load direct-drive nanopositioning stages
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The high-load direct-drive versions are available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system. Selectable calibration parameters provide optimal tuning for fast step-and- settle with different payload (up to 6 kg as standard).
NPS-X-60D and NPS-X-100D High-load direct-drive nanopositioning stages
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The high-load direct-drive versions are available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system. Selectable calibration parameters provide optimal tuning for fast step-and- settle with different payload (up to 6 kg as standard).
- Optical assembly positioning in semiconductor inspection
- Microscope nose piece positioning
- Precision manufacturing
| Model | NPS-X-60D | NPS-X-100D |
| Axis | X, Z | X, Z |
| Closed-loop range (typical) | 60 μm | 100 μm |
| Position noise (typical) | 0.1 nmrms | 0.15nmrms |
| Unidirectional repeatability (typical) | 0.7 nm | 0.9 nm |
| Linearity (typical) | 0.005% | 0.005% |
| 1 μm step settle time (1 kg / 3 kg / 6 kg) | 5.5 / 6.0 / 6.5 ms | 5.8 / 6 / 7 ms |
| 10 μm step settle time (1 kg / 3 kg / 6 kg) | 10 / 12 / 13 ms | 14 / 14 / 14 ms |
| 40 μm step settle time (1 kg / 3 kg / 6 kg) | 15 / 16 / 17.5 ms | 28 / 28 / 28 ms |
| Material | Aluminum (nickel plated) | Aluminum (nickel plated) |
| Size (L x W x H) | 220 x 210x 52 mm | 220 x 210 x 52 mm |
