A nanosensor is a non-contact position measuring system of extraordinary sensitivity based on the principle of capacitance micrometry. It can resolve to picometers with a range of up to 1.25mm.
Queensgate manufactures various styles of nanopositioning sensors: NX Series, all metal construction, are typically available in either Aluminum or Super Invar. Alternative materials are available to suit specific customer requirements, please consult Queensgate. The sensors can be driven using Queensgate's state of the art analog single channel controllers. Custom multi-channel systems can be produced as well as custom sensor head design, if required. Queensgate has produced numerous successful custom systems for applications in Wafer Stepping and the International Space Station. Please contact us to discuss your requirements.