NPS-X-250B / NPS-Z-250B High-load 250 μm piezo stage with capacitive sensor
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The high-load lever amplified version is available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system.
Flexure-guided motion minimizes rotational errors and direct metrology of the moving platform with low-noise capacitive sensors ensures the highest precision of positioning.
User selectable calibration parameters provide optimal tuning for fast step-and-settle with different payloads (up to 6 kg as standard).
Download the Datasheet
NPS-X-250B / NPS-Z-250B High-load 250 μm piezo stage with capacitive sensor
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The high-load lever amplified version is available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system.
Flexure-guided motion minimizes rotational errors and direct metrology of the moving platform with low-noise capacitive sensors ensures the highest precision of positioning.
User selectable calibration parameters provide optimal tuning for fast step-and-settle with different payloads (up to 6 kg as standard).
Download the Datasheet
Key features:
- 250 μm travel with sub-nanometer resolution.
- Typically 0.005% hysteresis and 0.004% linearity error.
- Load capacity up to 6 kg.
- Flexure guided with lever amplification.
- Calibration for optimal performance in horizontal or vertical orientation.
- Direct moving platform measurement with capacitive sensors.
- Optical nosepiece positioning
- White light surface metrology
- Semiconductor inspection
- Precision manufacturing
Model |
NPS-X-250B NPS-Z-250B |
Axis |
X or Z |
Open-loop range (typical) |
310 µm |
Closed-loop range (typical) |
250 µm |
Position noise |
0.6 nm |
Linearity (typical) |
0.004% |
Settle time – 2 µm step |
9 ms (fast, 1 kg) | 11 ms (medium, 2 kg) | 18 ms (slow, 6 kg) |
Settle time – 100 µm step |
18 ms (fast, 1 kg) | 18 ms (medium, 2 kg) | 33 ms (slow, 6 kg) |
Material |
Aluminum (nickel plated) |
Size (L x W x H) |
150 x 110 x 50 |
NPS-X-250B / NPS-Z-250B Datasheet
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NPS-X-250B / NPS-Z-250B Install Instructions
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