NPS-X-250B / NPS-Z-250B High-load 250 μm piezo stage with capacitive sensor

Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.

The high-load lever amplified version is available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system.

Flexure-guided motion minimizes rotational errors and direct metrology of the moving platform with low-noise capacitive sensors ensures the highest precision of positioning.

User selectable calibration parameters provide optimal tuning for fast step-and-settle with different payloads (up to 6 kg as standard).

Download the Datasheet

NPS-X-250B / NPS-Z-250B High-load 250 μm piezo stage with capacitive sensor

Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.

The high-load lever amplified version is available calibrated in either the X (horizontal) or Z (vertical) orientation for the best performance in the customer’s system.

Flexure-guided motion minimizes rotational errors and direct metrology of the moving platform with low-noise capacitive sensors ensures the highest precision of positioning.

User selectable calibration parameters provide optimal tuning for fast step-and-settle with different payloads (up to 6 kg as standard).

Download the Datasheet

Key features:

  • 250 μm travel with sub-nanometer resolution.
  • Typically 0.005% hysteresis and 0.004% linearity error.
  • Load capacity up to 6 kg.
  • Flexure guided with lever amplification.
  • Calibration for optimal performance in horizontal or vertical orientation.
  • Direct moving platform measurement with capacitive sensors.
  • Optical nosepiece positioning
  • White light surface metrology
  • Semiconductor inspection
  • Precision manufacturing
Model NPS-X-250B  NPS-Z-250B
Axis X or Z
Open-loop range (typical) 310 µm
Closed-loop range (typical) 250 µm
Position noise 0.6 nm
Linearity (typical) 0.004%
Settle time – 2 µm step 9 ms (fast, 1 kg) | 11 ms (medium, 2 kg) | 18 ms (slow, 6 kg)
Settle time – 100 µm step 18 ms (fast, 1 kg) | 18 ms (medium, 2 kg) | 33 ms (slow, 6 kg)
Material Aluminum (nickel plated)
Size (L x W x H) 150 x 110 x 50

NPS-X-250B / NPS-Z-250B Datasheet

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NPS-X-250B / NPS-Z-250B Install Instructions

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