- Sub-nanometer position resolution
- Zero hysteresis
- Linearity error down to 0.02%
- Bandwidth up to 10 kHz
- High thermal stability construction (Super invar, zerdur and ceramic options available)
- UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants
NanoSensors – NX Series Capacitive Sensors
Nanopositioning Sensor – NanoSensor for the ultimate in position monitoring
The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.
The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.
NanoSensors – NX Series Capacitive Sensors
Nanopositioning Sensor – NanoSensor for the ultimate in position monitoring
The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.
The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.
- Precision manufacturing
- Metrology
- Deformation measurements
- Stain measurement (used on space station robotic arm and hand)
- Stage control
- Materials testing
- Microscopy
- Active Optics
- Precision Beam Steering
