- 500 μm closed-loop range with nanometer-level resolution.
- Ultra-low rotation errors: 0.0025°.
- Capacitive positioning sensor providing unrivalled position precision and accuracy. 2nm resolution and 5nm repeatability.
- Typically 0.002 % linearity error
- Dynamic performance: unloaded resonant frequency typically 210 Hz and servo loop bandwidths up to 55 Hz.
- In-situ scanning and step response optimization.
- Plug and Play: stage connector containing the stage calibration data and reference sensor allowing easy controller interchangeability.
NPS-Z-500C Ultra-compact 500 μm precision elevation stage
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The NPS-Z-500C is an ultra-compact, long-range piezo elevation stage which moves 500 μm in closed loop.
Designed with OEM and customization projects in mind, its small footprint is ideal for easy integration within instrumentation or test equipment. The built-in capacitive positioning sensors enable ultra-high speed performance and low nanometer-level repeatability.
The stage has very low error motions, maintaining a very flat platform over its full 500 μm travel range. This allows the sample holder to be offset, improving access to the sample whilst maintaining high performance positioning. Sample holders and stage mountings can be customized to suit a wide range of applications from microscopy, to hard disk testing and semiconductor inspection.
Suggested controllers:
- NPC-D-6110
NPS-Z-500C Ultra-compact 500 μm precision elevation stage
Queensgate’s nanopositioning stage (NPS) series are designed to provide optimal performance in the most demanding high-speed and high-precision applications.
The NPS-Z-500C is an ultra-compact, long-range piezo elevation stage which moves 500 μm in closed loop.
Designed with OEM and customization projects in mind, its small footprint is ideal for easy integration within instrumentation or test equipment. The built-in capacitive positioning sensors enable ultra-high speed performance and low nanometer-level repeatability.
The stage has very low error motions, maintaining a very flat platform over its full 500 μm travel range. This allows the sample holder to be offset, improving access to the sample whilst maintaining high performance positioning. Sample holders and stage mountings can be customized to suit a wide range of applications from microscopy, to hard disk testing and semiconductor inspection.
Suggested controllers:
- NPC-D-6110
- High precision microscopy
- Confocal
- Light sheet
- Hard disk inspection
- Semiconductor inspection and manufacture
- Scientific and medical instrumentation
- Mirror positioning
| Model | NPS-Z-500C |
| Axis | Z |
| Range | 500 μm |
| Position noise | 2 nm |
| Repeatability | 5 nm |
| Linearity | 0.02 % |
| Step Settle | 10 ms |
| Material | Aluminum/ Stainless Steel |
| Size (L x W x H) | 60mm x 35.5mm x 24.5mm |
