- 100 μm travel in XY and 20 μm in Z axis with sub-nanometer resolution.
- Capacitive positioning sensor providing unrivalled precision and accuracy. 0.25 nm resolution in XY, 0.085 nm resolution in Z and 0.5 nm repeatability in XY and Z.
- In-situ scanning and step response optimization.
- Plug and Play: Stage connector containing the stage calibration data and reference sensor allowing easy controller interchangeability.
- Four corner mounting for best dynamic stability.
- Robust and reliable.
NPS-XYZ-100D-20H 3-axis piezo driven, flexure guided stage
The NPS-XYZ-100D-20H NanoMechanism provides 100 μm travel in the X and Y axis, plus 20 μm in Z.
Its flexure guiding stage with guarantees pitch and yaw of < 25 micro-radians over the full 100 μm in XY.
Integrated capacitance positioning sensors deliver sub- nanometer resolution.
The NPS-XYZ-100D-20H is made from aluminum.
When the stage is combined with the QGNPC-D-6330 multichannel digital controller, it provides market-leading dynamic performance.
NPS-XYZ-100D-20H 3-axis piezo driven, flexure guided stage
The NPS-XYZ-100D-20H NanoMechanism provides 100 μm travel in the X and Y axis, plus 20 μm in Z.
Its flexure guiding stage with guarantees pitch and yaw of < 25 micro-radians over the full 100 μm in XY.
Integrated capacitance positioning sensors deliver sub- nanometer resolution.
The NPS-XYZ-100D-20H is made from aluminum.
When the stage is combined with the QGNPC-D-6330 multichannel digital controller, it provides market-leading dynamic performance.
- AFM, SPM, NSOM
- High Precision Microscopy
| Model | NPS-XYZ-100D-20H | NPS-XYZ-100D-20H |
| Axis | X, Y | Z |
| Closed-loop range (typical) | ± 50 μm | ± 10 μm |
| Position noise (typical) | 0.25 ms | 0.085 nm |
| Repeatability ± 25 μm (typical) |
0.5 nm | 0.5 nm |
| Linearity (typical) | 0.005% | 0.015% |
| 2 % 2 μm step settle time | 7 ms (fast) | 12 ms (medium) | 4 ms (minimum) | 9 ms (typical) |
| 2 % 40 μm step settle time | 7 ms (fast) | 12 ms (medium) | n/a |
| Material | Aluminum (nickel plated) | Aluminum (nickel plated) |
| Size (L x W x H) | 100 x 100 x 30 | 100 x 100 x 30 |
