NPS-XY-100A Super Invar Two Axis 100µm x 100µm Stage

The NPS-XY-100 is a piezo scanned flexure guided stage with integrated capacitance position sensors and is capable of sub-nanometer resolution and reproducibility.

Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.

The NPS-XY-100A Super Invar Two Axis 100µm x 100µm Stage is made of Super Invar construction (CTE 0.3ppm K-1) which minimizes thermal drift, on a nanometer scale this is very important. With 3 point kinematic mounts.

Suggested controllers

  • NPC-D-6330

Download datasheet

NPS-XY-100A Super Invar Two Axis 100µm x 100µm Stage

The NPS-XY-100 is a piezo scanned flexure guided stage with integrated capacitance position sensors and is capable of sub-nanometer resolution and reproducibility.

Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.

The NPS-XY-100A Super Invar Two Axis 100µm x 100µm Stage is made of Super Invar construction (CTE 0.3ppm K-1) which minimizes thermal drift, on a nanometer scale this is very important. With 3 point kinematic mounts.

Suggested controllers

  • NPC-D-6330

Download datasheet

  • > 100 micrometer travel in each axis with sub-nanometer resolution
  • < 0.005% hysteresis and linearity error
  • First resonant frequency > 350 Hz (NPS-XY-100A) >500 Hz (NPS-XY-100B) >650 Hz (NPS-XY-100D)
  • High bandwidths (> 50 Hz) and fast response times
  • In-situ scanning and stepping response optimization
  • Use with NPS-Z-15A or NPS-Z-15H for XYZ options
  • Super Invar construction (NPS-XY-100A), Aluminum Alloy (NPS-XY-100B) or Aluminum (NPS-XY-100BD)
  • High Precision Microscopy
  • AFM, SPM, NSOM
Model NPS-XY-100A NPS-XY-100A-UHV
Axis X,Y X, Y
Range 110um XY 110um XY
Position noise 0.2nm 0.25nm
Repeatability 0.6nm 0.75nm
Linearity 0.005% 0.010%
Step Settle 15ms 15ms
Material Super Invar Super Invar
Size (L x W x H) 100mm x 100mm x 23mm 100mm x 100mm x 23mm

NPS-XY-100A-and-NPS-XY-UHV-Datasheet

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