NPS-Z-15B
The NPS-Z-15B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans.
The NPS-Z-15B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans. It is ideal for use in scanning probe microscopy and interferometry, where purity of motion is important. For these applications see also the NPS-Z-15A and the NPS-Z15H.
Downloads
Features
- > 15 micrometer travel with sub-nanometer resolution
- < 0.005% hysteresis and linearity error
- First resonant frequency > 1.8 KHz
- High bandwidths (> 300 Hz) and fast response times
- In-situ scanning and stepping response optimization
- Robust and reliable
- Super Invar construction
Applications
- Scanning Probe Microscopy
- NSOM
- Atomic Force Microscopy
- Precision Engineering
- Interferometry
- Metrology
Suggested Controller
- NPS3110
