Overview
The NPS-XY-100B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range.
The aluminium construction (CTE 23ppm K-1, c.f. SI at 0.3ppm K-1) increases thermal drift, which on a nanometer scale is very important. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.
The NPS-XY-100Boffers a cost-effective alternative to the SI version (NPS-XY-100A).
Features
> 100 micrometer travel in each axis with sub-nanometer resolution
< 0.005% hysteresis and linearity error
First resonant frequency > 600 Hz
High bandwidths (> 90 Hz) and fast response times (<10ms)
In-situ scanning and stepping response optimization
Robust and reliable
Aluminium construction
Applications
High Precision Microscopy
AFM, SPM, NSOM
Suggested Controller
NPS3220 or NPS3330
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