Overview
The NPS-Z-15H is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans. A hollow center means it is ideal for use in near field scanning optical microscopy (NSOM).
A optional fiber chuck is also available. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control. For these applications see also the NPS-Z-15A and the NPS-Z15B.
* requires ADP-XY100/Z15H
Features
> 15 micrometer travel with sub-nanometer resolution
< 0.01% hysteresis and linearity error
First resonant frequency > 900 Hz
High bandwidths (> 200 Hz) and fast response times
In-situ scanning and stepping response optimization
Robust and reliable
Super Invar construction
Applications
Scanning Probe Microscopy
NSOM ยท Atomic Force Microscopy
Laser cavity tuning
Interferometry
Metrology
Suggested Controller
NPS3110
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