Overview
The NPS-Z-15B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans. It is ideal for use in scanning probe microscopy and interferometry, where purity of motion is important. For these applications see also the NPS-Z-15A and the NPS-Z15H.
Features
> 15 micrometer travel with sub-nanometer resolution
< 0.005% hysteresis and linearity error
First resonant frequency > 1.8 KHz
High bandwidths (> 300 Hz) and fast response times
In-situ scanning and stepping response optimization
Robust and reliable
Super Invar construction
Applications
Scanning Probe Microscopy
NSOM
Atomic Force Microscopy
Precision Engineering
Interferometry
Metrology
Suggested Controller
NPS3110
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