Overview
The NPS-Z-15A is a piezo-scanned flexure guided stage with integrated capacitance position sensors. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control*.
It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation from the axis of travel; it is ideal for use in scanning probe microscope tips and other applications where sideways motion is not tolerable.
* requires ADP-XY100/Z15A
Features
> 15 micrometer travel with sub-nanometer resolution
< 0.005% hysteresis and linearity error
First resonant frequency > 2.5 KHz
High bandwidths (> 300 Hz) and fast response times
In-situ scanning and stepping response optimization
Robust and reliable
Super Invar construction
Applications
Scanning Probe Microscopy
NSOM
Atomic Force Microscopy
Precision Engineering
Interferometry
Metrology
Suggested Controller
NPS3110
Request a Quote »