Overview
The NanoSensor¨ is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor.
The spacing of these two plates can be measured, using the appropriate electronic controller, to better than 0.1nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the NanoSensor¨ is a non contact method, it is free of hysteresis. No power is dissipated at the point of measurement.
Features
Subnanometer position resolution
Zero hysteresis
Linearity error down to 0.02%
Bandwidth up to 5 kHz
Super Invar versions available
Vacuum compatible options
Applications
Stage control
Microscopy
Structural deformation
Vibration control
Materials testing
Precision engineering
Metrology
Active Optics
Precision Beam Steering
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