Overview
The NPS-XY-100A is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range.
The Super Invar construction (CTE 0.3ppm K-1, c.f. Al at 23ppm K-1) minimizes thermal drift, which on a nanometer scale is very important. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.
Features
> 100 micrometer travel in each axis with sub-nanometer resolution
< 0.005% hysteresis and linearity error
First resonant frequency > 350 Hz
High bandwidths (> 50 Hz) and fast response times
In-situ scanning and stepping response optimization
Use with NPS-Z-15A or NPS-Z-15H for XYZ options
Super Invar construction
Applications
High Precision Microscopy
AFM, SPM, NSOM
Suggested Controller
NPS3220
Related Products
NPS-XY-100B (aluminium)
Request a Quote »