Overview
The NPS-Z-15L is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed for high stiffness to move large loads. An optional tungsten carbide ball end piece is available to aid mounting of the actuator in situ.
Features
> 15 micrometer travel with sub-nanometer resolution
< 0.005% hysteresis and linearity error
First resonant frequency > 8 kHz
High bandwidths (> 1 kHz) and fast response times
In-situ scanning and stepping response optimization
Robust and reliable
Super Invar construction
Applications
Precision alignment of large masses, e.g. lenses, masks, wafer chucks and machine tools
Suggested Controller
NPS3110
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